Charged particle beam device
AssigneeHitachi High-Tech Corporation
InventorsYusuke Abe, Yusuke Nakamura, Shunsuke Mizutani, Muneyuki Fukuda
Life of this patent
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Abstract
Provided is a charged particle beam device that can impart a function of an energy filter to even a small BSE detector. The charged particle beam device includes a fluorescent substance that converts charged particles generated by irradiation of a sample with a charged particle beam into light; a detector that detects the light emitted from the fluorescent substance; a light guide element for guiding the light from the fluorescent substance to the detector; a light amount adjuster that adjusts the amount of light that is received by the detector through the fluorescent substance and the light guide element; and a control unit that controls the light amount adjuster.
Claims12
A charged particle beam device comprising:
- a fluorescent substance that converts charged particles generated by irradiation of a sample with a charged particle beam into light;
- a detector that detects the light emitted from the fluorescent substance;
- a light guide element for guiding the light from the fluorescent substance to the detector;
- a light amount adjuster that adjusts the amount of light that is received by the detector through the fluorescent substance and the light guide element;
- and
- a control unit that controls the light amount adjuster;
- wherein the light guide element includes a scattering element that is provided in a part of a side surface of the light guide element to scatter light.
A charged particle beam device comprising:
- a fluorescent substance that converts charged particles generated by irradiation of a sample with a charged particle beam into light;
- a detector that detects the light emitted from the fluorescent substance;
- a light guide element for guiding the light from the fluorescent substance to the detector;
- a light amount adjuster that adjusts the amount of light that is received by the detector through the fluorescent substance and the light guide element;
- a control unit that controls the light amount adjuster;
- and
- a display unit that displays a user interface capable of inputting a parameter for adjusting the light amount adjuster;
- wherein the user interface is configured to input a level of an image quality of an acquired image.
A charged particle beam device comprising:
- a fluorescent substance that converts charged particles generated by irradiation of a sample with a charged particle beam into light;
- a detector that detects the light emitted from the fluorescent substance;
- a light guide element for guiding the light from the fluorescent substance to the detector;
- a light amount adjuster that adjusts the amount of light that is received by the detector through the fluorescent substance and the light guide element;
- and
- a control unit that controls the light amount adjuster;
- wherein when a period of a periodic structure in a planar direction of the sample is represented by Rs and a scattering spherical diameter of the charged particle beam to be irradiated in the sample that is determined depending on the irradiation energy of the charged particle beam is represented by rB,
- Rs<2×rB is satisfied.
Dependencies are inferred from the claim text.