Temperature-controlled fluid circulation apparatus and temperature-controlled fluid circulation system

A temperature-controlled fluid circulation system comprising:

• a valve unit;
• a first temperature-controlled fluid circulation apparatus comprising:
• a first-side flow path through which a fluid whose temperature has been controlled by a first-side temperature control unit is circulated via the valve unit;
• a first-side three-way valve located in the first-side flow path at a position that is downstream of the valve unit and upstream of a temperature control position by the first-side temperature control unit, a part between two ports out of three ports constituting a part of the first-side flow path;
• a first-side bypass flow path branching from the first-side flow path at a position that is downstream of the temperature control position by the first-side temperature control unit and upstream of the valve unit, to be connected to one remaining port out of the three ports of the first-side three-way valve, the one remaining port being other than the two ports that constitute a part of the first-side flow path;
• and a first-side pressure sensor that detects a pressure of the fluid flowing through the first-side flow path at a position that is downstream of the valve unit and upstream of the first-side three-way valve;
• a second temperature-controlled fluid circulation apparatus comprising:
• a second-side flow path through which a fluid whose temperature has been controlled by a second-side temperature control unit is circulated via the valve unit;
• a second-side three-way valve located in the second-side flow path at a position that is downstream of the valve unit and upstream of a temperature control position by the second-side temperature control unit, a part between two ports out of three ports constituting a part of the second-side flow path;
• a second-side bypass flow path branching from the second-side flow path at a position that is downstream of the temperature control position by the second-side temperature control unit and upstream of the valve unit, to be connected to one remaining port out of the three ports of the second-side three-way valve, the one remaining port being other than the two ports that constitute a part of the second-side flow path;
• and a second-side pressure sensor that detects a pressure of the fluid flowing through the second-side flow path at a position that is downstream of the valve unit and upstream of the second-side three-way valve;
• and
• a controller that controls the first-side three-way valve and the second-side three-way valve;
• wherein:
• the valve unit is configured to send, to a temperature control target, the fluid received from the first temperature-controlled fluid circulation apparatus, the fluid received from the second temperature-controlled fluid circulation apparatus, or the mixed fluid of the fluid received from the first temperature-controlled fluid circulation apparatus and the fluid received from the second temperature-controlled fluid circulation apparatus, and is configured to return the fluid having passed through the temperature control target to the first-side flow path or/and the second-side flow path;
• and
• the controller controls an opening degree of the first-side three-way valve in such a manner that the pressure of the fluid, which is detected by the first-side pressure sensor, becomes a specified first-side target pressure, and controls an opening degree of the second-side three-way valve in such a manner that the pressure of the fluid, which is detected by the second-side pressure sensor, becomes a specified second-side target pressure.