US 12,554,238 B2 · Device and method for alternately controlling the operation state of two treatment equipment

Abstract

Disclosed is a device and method for alternately controlling the operation state of two treatment equipment, each of which alternately operates to treat process emissions from a semiconductor manufacturing process, with two pipelines conveying the emissions to each of the treatment equipment, and two electric heating units providing heat to each of the pipelines, wherein the control device has a human-machine interface controller, a programmable controller, and a signal transmission port, the programmable controller sequentially controlling each of the control valves and each of the electric heating units so as to cause the electric heating units to select ramping up or ramping down the power rate, respectively, to reduce the electric energy consumption of the electric heating units in a standby state, and to reduce the overall carbon emissions.

A device for controlling an operation state of treatment equipment, the treatment equipment being alternatively operated to treat process emissions from manufacturing equipment in semiconductor manufacturing, the treatment equipment being a first treatment equipment unit and a second treatment equipment unit, the device comprising:

a first pipeline adapted to be connected between the first treatment equipment unit and the manufacturing equipment;
a second pipeline adapted to be connected to the second treatment equipment unit and the manufacturing equipment such that the process emissions are selectively conveyed through said first pipeline and said second pipeline to either the first treatment equipment unit and the second treatment equipment unit;
a first electric heating unit having a plurality of first electric heating belts and a first temperature controller, each of the plurality of first electric heating belts sequentially configured along said first pipeline so as to clad said first pipeline, the first temperature controller detecting a temperature of said first pipeline and controlling each of the plurality of first electric heating belts so as to generate heat energy based on the detected temperature;
a second electric heating unit having a plurality of second electric heating belts and a second temperature controller, each of the plurality of second electric heating belts being sequentially configured along said second pipeline so as to clad said second pipeline, the second temperature controller detecting a temperature of said second pipeline and controlling each of the plurality of second electric heating belts so as to generate heat energy based on the temperature detected by the second temperature controller;
a first control valve disposed at an end of said first pipeline and adapted to be connected to the manufacturing equipment;
a second control valve disposed at an end of said second pipeline and adapted to be connected to the manufacturing equipment;
a human-machine interface controller;
a programmable controller;
and
a signal transmission port, wherein said human-machine interface controller is electrically connected to said programmable controller, said programmable controller being electrically connected to said signal transmission port, said second positioning portion being coupled to said first control valve and to said second control valve, wherein said first temperature controller and said second temperature controller are coupled in parallel to said signal transmission port, said human-machine interface controller comprising:
a display;
a switching circuit;
and
a microprocessor, wherein said display and said switching circuit are each electrically connected to said microprocessor, said display displaying the temperature of said first pipeline and the temperature of said second pipeline based on signals from said microprocessor, said display displaying an on status and an off status of said first control valve and said second control valve, said switching circuit transmitting a first control signal to said microprocessor based on an operation by a user, said microprocessor processing the first control signal and transmitting a second control signal to said programmable controller based on processing results so as to sequentially control said first control valve and said second control valve and said first temperature controller and said second temperature controller through said signal transmission port respectively such that said first electric heating unit and said second electric heating unit are selected to ramp up or ramp down a power rate, said first control valve and said second control valve selectively opening or closing a connection state of said first pipeline and said second pipeline to the manufacturing equipment respectively.

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Device and method for alternately controlling the operation state of two treatment equipment

Life of this patent

Device and method for alternately controlling the operation state of two treatment equipment

Life of this patent

Abstract

Claims5