Model for calculating a stochastic variation in an arbitrary pattern
AssigneeASML Netherlands B.V.
InventorSteven George Hansen
Life of this patent
Estimating the term…
Abstract
A method of determining a relationship between a stochastic variation of a characteristic of an aerial image or a resist image and one or more design variables, the method including: measuring values of the characteristic from a plurality of aerial images and/or resist images for each of a plurality of sets of values of the design variables; determining a value of the stochastic variation, for each of the plurality of sets of values of the design variables, from a distribution of the values of the characteristic for that set of values of the design variables; and determining the relationship by fitting one or more parameters from the values of the stochastic variation and the plurality of sets of values of the design variables.
Claims20
A non-transitory computer-readable medium having instructions therein that, upon execution by a computer system, are configured to cause the computer system to at least:
- obtain a relationship between a stochastic variation and a plurality of imaging variables of a manufacturing process for transferring a portion of a layout onto a substrate or of an apparatus for use in the process;
- and
- apply the relationship to the portion of the layout to obtain a setting or modification of the apparatus or of a characteristic of the process;
- and
- output an electronic signal representing the setting or modification, or representing information derived therefrom.
A method comprising:
- obtaining a relationship between a stochastic variation and a plurality of imaging variables of a manufacturing process for transferring a portion of a layout onto a substrate or of an apparatus for use in the process;
- applying the relationship to the portion of the layout to obtain a setting or modification of the apparatus or of a characteristic of the process;
- and
- outputting an electronic signal representing the setting or modification, or representing information derived therefrom.
A non-transitory computer-readable medium having instructions therein that, upon execution by a computer system, are configured to cause the computer system to at least:
- obtain a multi-variable cost function, the multi-variable cost function being a function of a stochastic variation of a characteristic of an aerial or resist image, the stochastic variation being a function of at least one design variable that is a characteristic of a manufacturing process for transferring a portion of a layout onto a substrate or of an apparatus for use in the process;
- calculate the stochastic variation using a relationship between the stochastic variation and a plurality of imaging variables;
- reconfigure one or more characteristics of the process by adjusting one or more variables of the multi-variable cost function until a certain termination condition is satisfied;
- and
- output an electronic signal representing the adjusted one or more variables, or representing information derived therefrom.
Dependencies are inferred from the claim text.