Actinic ray-sensitive or radiation-sensitive resin composition, pattern forming method, resist film, method for manufacturing electronic device, compound, and method for producing compound

A compound comprising at least one cation represented by General Formula (1),

• (Rd1)m—[Xd1]+-(Ld1-Ard1—(S—Xd2)p)n (1)
• in General Formula (1), Xd1 represents a sulfur atom or an iodine atom, Rd1 represents a linear, branched, or cyclic alkyl group which may have a substituent, a linear, branched, or cyclic alkenyl group which may have a substituent, or an aryl group which may have a substituent, in a case where m represents 2, two Rd1's may be bonded to each other to form a ring, Ld1 represents a single bond or a divalent linking group, Ard1 represents an aromatic hydrocarbon ring group which may have a substituent, and Xd2 represents a group represented by General Formula (1-1) or a leaving group that leaves by an action of an acid,
• *-Ld2-Rd2 General Formula (1-1)
• in General Formula (1-1), Ld2 represents a single bond or a divalent linking group, Rd2 represents a group having a polarity that increases through decomposition by the action of an acid, * represents a bonding position,
• in a case where Xd1 represents the sulfur atom, n represents an integer of 1 to 3, m represents an integer of 0 to 2, and m+n is 3, in a case where Xd1 represents the iodine atom, n represents 1 or 2, m represents 0 or 1, and m+n is 2, and p represents an integer of 1 to 5, and
• wherein in General Formula (1), n is an integer of 2 or 3, or p is an integer of 2 to 5.

A method for producing the compound having at least one cation represented by General Formula (1),

• wherein a compound having at least one cation represented by General Formula (4) is reacted with a compound represented by General Formula (5) in a presence of a basic compound to produce the compound having at least one cation represented by General Formula (1),
• (Rd1)m—[Xd1]+-(Ld1-Ard1—(Rd3)p)n (4)
• in General Formula (4), Xd1 represents a sulfur atom or an iodine atom, Rd1 represents a linear, branched, or cyclic alkyl group which may have a substituent, a linear, branched, or cyclic alkenyl group which may have a substituent, or an aryl group which may have a substituent, in a case where m represents 2, two Rd1's may be bonded to each other to form a ring, Ld1 represents a single bond or a divalent linking group, Ard1 represents an aromatic hydrocarbon ring group which may have a substituent, in a case where Xd1 represents the sulfur atom, n represents an integer of 1 to 3, m represents an integer of 0 to 2, and m+n is 3, in a case where Xd1 represents the iodine atom, n represents 1 or 2, m represents 0 or 1, and m+n is 2, p represents an integer of 1 to 5, and Rd3 represents a halogen atom,
• HS-Xd2 General Formula (5)
• Xd2 represents a group represented by General Formula (1-1) or a leaving group that leaves by an action of an acid,
• *-Ld2-Rd2 Formula (1-1)
• in Formula (1-1), Ld2 represents a single bond or a divalent linking group, Rd2 represents a group having a polarity that increases through decomposition by an action of an acid, and * represents a bonding position,
• (Rd1)m—[Xd1]+-(Ld1-Ard1—(S—Xd2)p)n (1)
• in General Formula (1), Xd1 represents a sulfur atom or an iodine atom, Ra1 represents a linear, branched, or cyclic alkyl group which may have a substituent, a linear, branched, or cyclic alkenyl group which may have a substituent, or an aryl group which may have a substituent, in a case where m represents 2, two Rd1's may be bonded to each other to form a ring, Ld1 represents a single bond or a divalent linking group, Ard1 represents an aromatic hydrocarbon ring group which may have a substituent, and Xd2 represents a group represented by General Formula (1-1) or a leaving group that leaves by an action of an acid,
• *-Ld2-Rd2 General Formula (1-1)
• in General Formula (1-1), Ld2 represents a single bond or a divalent linking group, Rd2 represents a group having a polarity that increases through decomposition by the action of an acid, * represents a bonding position,
• in a case where Xd1 represents the sulfur atom, n represents an integer of 1 to 3, m represents an integer of 0 to 2, and m+n is 3, in a case where Xd1 represents the iodine atom, n represents 1 or 2, m represents 0 or 1, and m+n is 2, and p represents an integer of 1 to 5.