Micro-ring modulator and method for manufacturing micro-ring modulator
AssigneeZte Corporation
InventorsHaining Chong, Ningfeng Tang
Life of this patent
Estimating the term…
Abstract
Disclosed are a micro-ring modulator and a method for manufacturing a micro-ring modulator. The micro-ring modulator includes at least one straight waveguide and at least one surface plasmon polariton micro-ring resonator coupled to the straight waveguide. The straight waveguide is configured for transmitting an optical signal; and the surface plasmon polariton micro-ring resonator is configured for modulating an intensity of an optical signal with a wavelength corresponding to the surface plasmon polariton micro-ring resonator.
Claims15
A micro-ring modulator, comprising:
- at least one straight waveguide;
- and
- at least one surface plasmon polariton micro-ring resonator coupled to the straight waveguide,
- wherein the straight waveguide is configured for transmitting an optical signal, and the surface plasmon polariton micro-ring resonator is configured for modulating an intensity of an optical signal with a wavelength corresponding to the surface plasmon polariton micro-ring resonator;
- the straight waveguide comprises:
- a substrate;
- a lower cladding layer located on a surface of the substrate;
- a first waveguide layer located on a surface of a side of the lower cladding layer away from the substrate, wherein the first waveguide layer comprises a first plane waveguide and a ridge waveguide located on a surface of the first plane waveguide;
- and
- an upper cladding layer located on a surface of a side of the first waveguide layer away from the lower cladding layer, wherein the surface of the side of the upper cladding layer away from the first waveguide layer is a plane.
A method for manufacturing a micro-ring modulator, comprising:
- manufacturing at least one straight waveguide, the straight waveguide being configured for transmitting an optical signal;
- and
- manufacturing at least one surface plasmon polariton micro-ring resonator coupled to the straight waveguide, the surface plasmon polariton micro-ring resonator being configured for modulating an intensity of an optical signal with a wavelength corresponding to the surface plasmon polariton micro-ring resonator;
- wherein manufacturing a straight waveguide comprises:
- providing a substrate;
- forming a lower cladding layer on a surface of the substrate;
- forming a first waveguide layer on a surface of a side of the lower cladding layer away from the substrate, wherein the first waveguide layer comprises a first plane waveguide and a ridge waveguide located on a surface of the first plane waveguide;
- and
- forming an upper cladding layer on a surface of a side of the first waveguide layer away from the lower cladding layer, wherein the surface of the side of the upper cladding layer away from the first waveguide layer is a plane.
Dependencies are inferred from the claim text.