Packaging for a sensor and methods of manufacturing thereof

A gas stick assembly, comprising:

• a first end comprising an input configured to receive a gas from a gas source;
• a second end comprising an output configured to deliver the gas to a destination;
• one or more valves between the first end and the second end;
• and a sensor assembly between the first end and the second end, the sensor assembly comprising:
• a housing comprising;
• a first channel extending from a first opening at a bottom of the housing to a second opening at a top of the housing, the first channel configured to receive the gas from an upstream component of the gas stick assembly and flow the gas through the housing in a first direction;
• and a second channel extending from a third opening at the top of the housing to a fourth opening at the bottom of the housing, the second channel configured to flow the gas in a second direction opposite the first direction through the housing to direct the gas to a downstream component of the gas stick assembly;
• a substrate disposed within the housing, the substrate comprising an outer region, an inner region that is within the first channel, and a middle region positioned between the outer region and the inner region, the substrate further comprising one or more electrical contact pads on at least the inner region;
• and a sensor die coupled to the inner region of the substrate and having an electrical connection to the one or more electrical contact pads, wherein the sensor die is disposed within a gas flow path of the first channel.

A processing system comprising:

• a processing chamber;
• a gas supply;
• and a gas stick assembly, the gas stick assembly coupled between the processing chamber and the gas supply, wherein the gas stick assembly comprises:
• a first end comprising an input configured to receive a gas from the respective gas supply coupled to the gas stick assembly;
• a second end comprising an output configured to deliver the gas to the processing chamber;
• one or more valves between the first end and the second end;
• and a sensor assembly between the first end and the second end, the sensor assembly comprising:
• a housing comprising:
• a first channel extending from a first opening at a bottom of the housing to a second opening at a top of the housing, the first channel configured to receive the gas from an upstream component of the gas stick assembly;
• and a second channel extending from a third opening at the top of the housing to a fourth opening at the bottom of the housing, the second channel configured to direct the gas to a downstream component of the gas stick assembly;
• a substrate disposed within the housing, the substrate comprising an outer region, an inner region that is within the first channel, and a middle region positioned between the outer region and the inner region, the substrate further comprising one or more electrical contact pads on at least the inner region;
• and a sensor die coupled to the inner region of the substrate and having an electrical connection to the one or more electrical contact pads, wherein the sensor die is disposed within a gas flow path of the first channel.