Pneumatic valve with an SMA actuator

A pneumatic valve comprises:

• a fluid supply port,
• a fluid outlet port,
• a fluid drainage opening,
• a valve chamber with a fluid supply opening connected to the fluid supply port, a fluid outlet opening connected to the fluid outlet port, and a trigger opening connected to an actuator chamber of the valve with the fluid drainage opening,
• an actuator formed with an SMA wire, comprising an actuating element, a resetting element, and with a printed circuit board arranged in the actuator chamber,
• wherein a sealing element is arranged on the actuating element, said sealing element being pressed against the trigger opening by the resetting element in a unactuated state of the actuator and opening up the trigger opening in an actuated state of the actuator, and
• a membrane dividing the valve chamber into a first region connected to the trigger opening and a second region connected to the fluid outlet opening,
• wherein the membrane is connected to a plunger which, using a spring force in the unactuated state of the actuator, is pressed against and closes the fluid outlet opening, in the actuated state of the actuator, is pushed away from the fluid outlet opening by a fluid flowing through the fluid supply opening and opens up the fluid outlet opening, and
• wherein the membrane has at least one passage opening through which fluid can flow from the first region into the second region, the passage opening having a smaller cross section than the trigger opening.