Bellows pump device

A bellows pump device comprising:

• a first bellows that is expandable and contractible and configured to suck a transport fluid thereinto by expansion thereof and to discharge the transport fluid therefrom by contraction thereof;
• a second bellows expandable and contractible independently of the first bellows and configured to suck a transport fluid thereinto by expansion thereof and to discharge the transport fluid therefrom by contraction thereof;
• a first driving unit having a first suction-side fluid chamber and a first discharge-side fluid chamber and configured to cause the first bellows to expand to a predetermined expanded state by supplying a pressurized fluid to the first suction-side fluid chamber and to cause the first bellows to contract to a predetermined contracted state by supplying the pressurized fluid to the first discharge-side fluid chamber;
• a second driving unit having a second suction-side fluid chamber and a second discharge-side fluid chamber and configured to cause the second bellows to expand to a predetermined expanded state by supplying a pressurized fluid to the second suction-side fluid chamber and to cause the second bellows to contract to a predetermined contracted state by supplying the pressurized fluid to the second discharge-side fluid chamber;
• a control unit configured to perform drive control of the first driving unit and the second driving unit such that, before one bellows out of the first bellows and the second bellows comes into the predetermined contracted state, the other bellows is caused to contract from the predetermined expanded state;
• a first detection unit configured to detect the predetermined expanded state of the first bellows and a mid-contraction state in which the first bellows is closer to the predetermined contracted state than to the predetermined expanded state;
• a second detection unit configured to detect the predetermined expanded state of the second bellows and a mid-contraction state in which the second bellows is closer to the predetermined contracted state than to the predetermined expanded state;
• a first fluid pressure adjustment unit configured to adjust a fluid pressure of the pressurized fluid to be supplied to the first suction-side fluid chamber of the first driving unit;
• and
• a second fluid pressure adjustment unit configured to adjust a fluid pressure of the pressurized fluid to be supplied to the second suction-side fluid chamber of the second driving unit, wherein
• the control unit performs next pressure increase control of:
• controlling the first fluid pressure adjustment unit such that the fluid pressure at a next expansion of the first bellows is increased upon determining, on the basis of respective detection signals of the first detection unit and the second detection unit, whether or not the first bellows is in the predetermined expanded state when the second bellows contracts to the mid-contraction state, and in response to a determination result of the determination being negative;
• and
• controlling the second fluid pressure adjustment unit such that the fluid pressure at a next expansion of the second bellows is increased upon determining, on the basis of respective detection signals of the first detection unit and the second detection unit, whether or not the second bellows is in the predetermined expanded state when the first bellows contracts to the mid-contraction state, and in response to a determination result of the determination being negative.