Contactless conveying device
AssigneeRobert Bosch GmbH
InventorsHeike Raatz, Philipp Guth, Joachim Frangen
Life of this patent
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Abstract
A conveying device is configured to convey one or more payloads, in particular wafers, using transport bodies. The transport bodies are floatingly moved and positioned over a transport surface of a stator. The moving and positioning are preferably carried out with respect to all six degrees of freedom. The transport body has a movable boom or a movable manipulator or a movable robotic arm. At an end effector thereof, the payload is deposited or fastened. The payload can also be processed and/or checked. The processing and/or checking is carried out by an end effector of an additional transport body of the same conveying device.
Claims20
A conveying device for conveying at least one payload, comprising:
- a stator defining a transport surface;
- at least one transport body configured to be floatingly moved and positioned over the transport surface of the stator, the at least one transport body including an end effector and a housing, the at least one payload associated with the at least one transport body;
- and
- one of a boom, a manipulator, or a robotic arm extending between the end effector and the housing of the at least one transport body,
- wherein:
- the end effector is configured to be brought into operative connection with the at least one payload,
- the boom, the manipulator, or the robotic arm enables and controls at least one first degree of freedom of movement of the end effector relative to the housing, and
- at least one magnet array is movably accommodated in the housing of the at least one transport body, the at least one magnet array mechanically coupled to the boom, the manipulator, or robotic arm,
- the at least one magnet array is configured to be moved by being brought into magnetic interaction with the stator,
- the at least one magnet array is rotatably mounted in a bearing,
- a belt pulley is attached or coupled in a fixed manner to the at least one magnet array, and
- the belt pulley is mechanically coupled to the boom, the manipulator, or the robotic arm via a transmission belt.
A conveying device for conveying at least one payload, comprising:
- a stator defining a transport surface;
- at least one transport body configured to be floatingly moved and positioned over the transport surface of the stator, the at least one transport body including an end effector and a housing, the at least one payload associated with the at least one transport body;
- and
- one of a boom, a manipulator, or a robotic arm extending between the end effector and the housing of the at least one transport body,
- wherein:
- the end effector is configured to be brought into operative connection with the at least one payload,
- the boom, the manipulator, or the robotic arm enables and controls at least one first degree of freedom of movement of the end effector relative to the housing, and
- at least one magnet array is movably accommodated in the housing of the at least one transport body, the at least one magnet array mechanically coupled to the boom, the manipulator, or robotic arm,
- the at least one magnet array is configured to be moved by being brought into magnetic interaction with the stator, and
- the at least one transport body includes two transport bodies each having symmetric end effectors configured to be moved toward one another at a lateral offset.
A conveying device for conveying at least one payload, comprising:
- a stator defining a transport surface;
- at least one transport body configured to be floatingly moved and positioned over the transport surface of the stator, the at least one transport body including an end effector and a housing, the at least one payload associated with the at least one transport body;
- and
- one of a boom, a manipulator, or a robotic arm extending between the end effector and the housing of the at least one transport body,
- wherein:
- the end effector is configured to be brought into operative connection with the at least one payload,
- the boom, the manipulator, or the robotic arm enables and controls at least one first degree of freedom of movement of the end effector relative to the housing, and
- at least one magnet array is movably accommodated in the housing of the at least one transport body, the at least one magnet array mechanically coupled to the boom, the manipulator, or robotic arm,
- the at least one magnet array is configured to be moved by being brought into magnetic interaction with the stator, and
- the at least one transport body includes two transport bodies each having end effectors including two asymmetric fingers.
Dependencies are inferred from the claim text.