Subtractive skip via
AssigneeInternational Business Machines Corporation
InventorsNicholas Anthony Lanzillo, Koichi Motoyama, Lawrence A. Clevenger
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AssigneeInternational Business Machines Corporation
InventorsNicholas Anthony Lanzillo, Koichi Motoyama, Lawrence A. Clevenger
Estimating the term…
A semiconductor device includes a subtractive skip via technique in which a relatively high aspect ratio (HAR) skip via is fabricated within a lower aspect ratio (LAR) skip via opening. A metal fill is formed within the LAR skip via opening. Undesired portions of the metal fill region are removed, a retained portion or portion thereof forms the HAR skip via, and/or retained portions thereof forms multiple HAR skip vias, or the like. After forming these substrative via(s), a dielectric backfill may be formed therearound within the remaining LAR skip via opening. This backfill dielectric may be selected to reduce shorting propensities between the substrative via(s) and respective one or more wiring structures in a lower level, in a higher level, and/or the skipped level(s).
A semiconductor device comprising:
A semiconductor device comprising:
A semiconductor device comprising:
Dependencies are inferred from the claim text.