Schottky diode and manufacturing method thereof
AssigneeEnkris Semiconductor, Inc.
InventorKai Cheng
Life of this patent
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AssigneeEnkris Semiconductor, Inc.
InventorKai Cheng
Estimating the term…
Disclosed are a Schottky diode and a manufacturing method thereof. The Schottky diode includes a substrate, a first semiconductor layer, a heterostructure layer, a passivation layer, and a cap layer stacked in sequence. The passivation layer includes a first groove and a second groove, and the first groove and the second groove penetrate through at least the passivation layer. A first electrode is arranged at least on the cap layer corresponding to the first groove; a second electrode is arranged in the second groove. A Schottky contact is formed between the first electrode and the cap layers, so that a direct contact area between the first electrode and the heterostructure layer may be avoided, a contradiction between the forward turn-on voltage and the reverse leakage of the Schottky diode may be balanced, and a leakage characteristic of the heterostructure layer in a high temperature environment may be suppressed.
A Schottky diode, comprising:
Dependencies are inferred from the claim text.