Quantum cascade laser element and quantum cascade laser device
AssigneeHamamatsu Photonics K.K.
InventorsAtsushi Sugiyama, Tadataka Edamura, Naota Akikusa
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AssigneeHamamatsu Photonics K.K.
InventorsAtsushi Sugiyama, Tadataka Edamura, Naota Akikusa
Estimating the term…
A quantum-cascade laser element includes: a semiconductor substrate; a semiconductor mesa formed on the semiconductor substrate to include an active layer having a quantum-cascade structure and to extend along a light waveguide direction; an embedding layer formed to interpose the semiconductor mesa along a width direction of the semiconductor substrate; a cladding layer formed over the semiconductor mesa and over the embedding layer; and a metal layer formed on the cladding layer. A pair of groove portions extending along the light waveguide direction are formed in a surface on an opposite side of the cladding layer from the semiconductor substrate. The pair of groove portions are disposed in two respective outer regions when the cladding layer is equally divided into four regions in the width direction of the semiconductor substrate. The metal layer enters the pair of groove portions.
A quantum-cascade laser element comprising:
Dependencies are inferred from the claim text.