US 12,548,870 B2 · Tunable phase shifter comprising a tunable dielectric layer between first and second electrodes of specified sheet resistance and method for manufacturing

Abstract

A tunable phase shifter and a method for manufacturing the same, and a tunable phase shifting device. The phase shifter includes a first substrate, a second substrate, and a tunable dielectric layer between the first substrate and the second substrate; the first substrate includes a first base substrate and a first electrode on the first base substrate; the second substrate includes a second base substrate and a second electrode on the second base substrate; an orthographic projection of the first electrode on the first base substrate is at least partially overlapped with an orthographic projection of the second electrode on the first base substrate, and sheet resistances of materials of the first electrode and the second electrode are both less than or equal to 0.024Ω/□.

Claims20

Dependent claims

A tunable phase shifter, comprising:

a first substrate, comprising a first base substrate and at least one first electrode on the first base substrate;
a second substrate, comprising a second base substrate and at least one second electrode on the second base substrate;
and
a tunable dielectric layer, between the first substrate and the second substrate,
wherein an orthographic projection of the at least one first electrode on the first base substrate is at least partially overlapped with an orthographic projection of the at least one second electrode on the first base substrate, and sheet resistances of materials of the at least one first electrode and the at least one second electrode are both less than or equal to 0.024Ω/□.

2 more elements

A method for manufacturing a tunable phase shifter, comprising:

forming a first substrate, wherein the first substrate comprises a first base substrate and a first electrode on the first base substrate;
forming a second substrate, wherein the second substrate comprises a second base substrate and a second electrode on the second base substrate;
and
cell-assembling the first substrate and the second substrate, and filling a liquid crystal between the first substrate and the second substrate, so as to form a tunable dielectric layer between the first substrate and the second substrate,
wherein an orthographic projection of the first electrode on the first base substrate is at least partially overlapped with an orthographic projection of the second electrode on the first base substrate, and sheet resistances of materials of the first electrode and the second electrode are both less than or equal to 0.024Ω/□.

2 more elements

Dependencies are inferred from the claim text.

Tunable phase shifter comprising a tunable dielectric layer between first and second electrodes of specified sheet resistance and method for manufacturing

Life of this patent

Tunable phase shifter comprising a tunable dielectric layer between first and second electrodes of specified sheet resistance and method for manufacturing

Life of this patent

Abstract

Claims20