Method of manufacturing crystalline material from different materials

A method of manufacturing a crystalline layer of material on a surface, the crystalline layer comprising lithium, at least one transition metal and at least one counter-ion, wherein the method comprises the following steps:

• generating a plasma using a remote plasma generator,
• plasma sputtering material from a first target comprising lithium onto a surface of or supported by a substrate, there being at least a first plume corresponding to trajectories of particles from the first target onto the surface, and
• plasma sputtering material from a second target comprising at least one transition metal onto the surface, there being at least a second plume corresponding to trajectories of particles from the second target onto the surface,
• wherein the first target is positioned to be non-parallel with the second target, wherein the first target faces towards the substrate in a first direction, and the second target faces towards the substrate in a second direction, the first and second directions converging towards the substrate, wherein a first notional line parallel to the first direction which extends from the center of a surface of the first target facing the substrate intersects, in the cross-section, a second notional line parallel to the second direction which extends from the center of a surface of the second target facing the substrate, at a location on a side of the substrate opposite to a front side of the substrate facing the targets;
• wherein the first plume and the second plume converge at a region proximate to the surface of or supported by the substrate, and
• wherein the crystalline layer is formed on the surface at said region.