Mass spectrometer
AssigneeHitachi High-Tech Corporation
InventorsYuka Sugawara, Masuyuki Sugiyama, Yuichiro Hashimoto, Hiroyuki Yasuda, Riku Tamura
Life of this patent
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Abstract
To provide a mass spectrometer for higher ion permeation efficiency. In a mass spectrometer to transfer ions generated in an ion source 101 to a detector 106 through a vacuum chamber equipped with electrodes, the vacuum chamber includes a first vacuum chamber 107 and a second vacuum chamber 108 communicated by a pore 104 and an air flow containing ions introduced from the ion source 101 into the first vacuum chamber 107 is separated to an air flow 704 and an ion flow 703 by an ion guide 103 in the first vacuum chamber 107. The first vacuum chamber 107 has a current plate 113 to reduce mixing of the separated air flow 704 and ion flow 703.
Claims10
A mass spectrometer to transfer ions generated in an ion source to a detection unit through a vacuum chamber equipped with electrodes, wherein:
- the vacuum chamber includes a first vacuum chamber and a second vacuum chamber communicated by a pore;
- an air flow containing ions introduced from the ion source into the first vacuum chamber is separated to an air flow and an ion flow by an ion guide in the first vacuum chamber;
- the first vacuum chamber has a straightening member to reduce mixing of the separated air flow and ion flow;
- the straightening member comprises an insulating material;
- the ion guide has a first electrode set including a first plurality of rod electrodes and a second electrode set including a second plurality of rod electrodes;
- the ion guide has a region where the first electrode set and the second electrode set overlap with each other in a longitudinal direction;
- the ion guide generates electrical potential to transfer ions incident on the first electrode set from the first electrode set to the second electrode set in the overlapping region;
- an incident side end of the straightening member is located between a center axis of the first electrode set and a center axis of the second electrode set, and an exit side end of the straightening member is located below the center axis of the second electrode set and farther from the first electrode set than the incident side end such that the straightening member has an inclined surface relative to the center axis of the second electrode set;
- and
- the incident side end of the straightening member is surrounded by the first and second pluralities of rod electrodes.
Dependencies are inferred from the claim text.