Polymeric coating for semiconductor processing chamber components
AssigneeLam Research Corporation
InventorsYuanping Song, Johnny Pham, Yiwei Song, Lin Xu, Christopher Kimball
Life of this patent
Estimating the term…
Abstract
A component in a semiconductor processing chamber is provided. An electrically conductive semiconductor or metal body has a CTE of less than 10.0×10−6/K. An intermediate layer is disposed over at least one surface of the body, the intermediate layer comprising a fluoropolymer. A perfluoroalkoxy alkane (PFA) layer is disposed over the intermediate layer to form the component.
Claims21
A semiconductor processing chamber, comprising:
- a plasma processing chamber;
- an electrostatic chuck within the plasma processing chamber;
- and
- a component forming a ring around the electrostatic chuck, the component comprising:
- an electrically conductive semiconductor or metal body,
- wherein the body has a CTE of less than 10.0×10−6/K;
- an intermediate layer disposed over at least one surface of the body, the intermediate layer comprising a fluoropolymer;
- and
- a perfluoroalkoxy alkane (PFA) layer disposed over the intermediate layer to form the component.
A method for forming a component for use in a semiconductor processing chamber, the method comprising:
- providing an electrically conductive semiconductor or metal body;
- wherein the body has a CTE of less than 10.0×10−6/K;
- forming an intermediate layer over at least one surface of the body, the intermediate layer comprising fluoropolymer;
- forming a perfluoroalkoxy alkane (PFA) layer over the intermediate layer to form the component;
- and
- installing the component in a semiconductor processing chamber;
- wherein the component forms a ring around an electrostatic chuck within the semiconductor processing chamber, the electrostatic chuck supporting a wafer for processing.
An edge ring for use in a plasma processing chamber, comprising:
- an elemental silicon edge ring body;
- a fluoropolymer coating on at least one surface of the elemental silicon edge ring body;
- and
- a perfluoroalkoxy alkane (PFA) coating on the fluoropolymer coating.
Dependencies are inferred from the claim text.