Salt, acid generator, resist composition and method for producing resist pattern
AssigneeSumitomo Chemical Company, Limited
InventorsKatsuhiro Komuro, Koji Ichikawa
Life of this patent
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Abstract
Disclosed are a salt represented by formula (I), an acid generator, and a resist composition comprising the same: wherein R1 and R2 each represent a hydroxy group, *—O—R10, *—O-L10-CO—O—R10; L10 represents an alkanediyl group; R10 represents an acid-labile group; R4, R5, R7 and R8 each represent a halogen atom, a haloalkyl group or a hydrocarbon group; A1 and A2 each represent a hydrocarbon group, the hydrocarbon group may have a substituent, and —CH2— included in the hydrocarbon group may be replaced by —O—, —CO—, —S— or —SO2—; m1 represents an integer of 1 to 5, m2 and m8 represent an integer of 0 to 5, m4, m5 and m7 represent an integer of 0 to 4, 1≤m1+m7≤5, 0≤m2+m8≤5; and Al− represents an organic anion.
Claims16
A salt represented by formula (I):
- wherein, in formula (I),
- R1 and R2 each independently represent a hydroxy group, *—O—R10, *—O—CO—O—R10 or *—O-L10-CO—O—R10, and * represents a bonding site to the benzene ring,
- L10 represents an alkanediyl group having 1 to 6 carbon atoms,
- R10 represents an acid-labile group,
- R4, R5, R7 and R8 each independently represent a halogen atom, a haloalkyl group having 1 to 12 carbon atoms or a hydrocarbon group having 1 to 18 carbon atoms, the hydrocarbon group may have a substituent, and —CH2— included in the haloalkyl group and the hydrocarbon group may be replaced by —O—, —CO—, —S— or —SO2—,
- A1 and A2 each independently represent a hydrocarbon group having 2 to 20 carbon atoms, the hydrocarbon group may have a substituent, and —CH2— included in the hydrocarbon group may be replaced by —O—, —CO—, —S— or —SO2—,
- m1 represents an integer of 1 to 5, and when m1 is 2 or more, a plurality of groups in parentheses may be the same or different from each other,
- m2 represents an integer of 0 to 5, and when m2 is 2 or more, a plurality of groups in parentheses may be the same or different from each other,
- m4 represents an integer of 0 to 4, and when m4 is 2 or more, a plurality of R4 may be the same or different from each other,
- m5 represents an integer of 0 to 4, and when m5 is 2 or more, a plurality of R5 may be the same or different from each other,
- m7 represents an integer of 0 to 4, and when m7 is 2 or more, a plurality of R7 may be the same or different from each other,
- m8 represents an integer of 0 to 5, and when m8 is 2 or more, a plurality of R8 may be the same or different from each other,
- in which 1≤m1+m7≤5, 0≤m2+m8≤5, and
- Al− represents an organic anion.
Dependencies are inferred from the claim text.