Spin coater

A spin coater comprising:

• a spin chuck configured to make contact with a central region of a lower surface of a substrate, the spin chuck configured to rotate the substrate when photoresist is on the substrate;
• a nozzle over a central region of the spin chuck and configured to provide a central region of an upper surface of the substrate with the photoresist;
• a first temperature controller configured to control a temperature of an edge region of the spin chuck;
• a second temperature controller configured to control a temperature of the central region of the spin chuck;
• a thickness sensor configured to measure a thickness of the photoresist on the upper surface of the substrate;
• and
• a main controller configured to control operations of the first temperature controller and the second temperature controller in accordance with the thickness of the photoresist measured by the thickness sensor,
• wherein the first temperature controller includes
• four first non-contact type power supply devices spaced apart from each other by a same gap with respect to a center of the spin chuck,
• four first thermoelectric elements in the spin chuck, the four first thermoelectric elements configured to receive a first power from the four first non-contact type power supply devices, respectively, and configured to generate a first hot air or cold air, and
• four first transfer members extending radially from the center of the spin chuck and connected between the four first thermoelectric elements and the edge region of the spin chuck, the four first transfer members configured to transfer the first hot air or cold air to the edge region of the spin chuck, and
• wherein the second temperature controller includes
• four second non-contact type power supply devices spaced apart from each other by a same gap amount with respect to the center of the spin chuck,
• four second thermoelectric elements in the spin chuck, the four second thermoelectric elements configured to receive a second power from the four second non-contact type power supply devices, respectively, and configured to generate a second hot air or cold air, and
• four second transfer members extending from the center of the spin chuck between the four first transfer members, respectively, and connected between the four second thermoelectric elements and the central region of the spin chuck, the four second transfer members configured to transfer the second hot air or cold air to the central region of the spin chuck.

A spin coater comprising:

• a spin chuck configured to make contact with a central region of a lower surface of a substrate, the spin chuck configured to rotate the substrate when photoresist is on the substrate;
• a nozzle over a central region of the spin chuck and configured to provide a central region of an upper surface of the substrate with the photoresist;
• a first temperature controller configured to control a temperature of an edge region of the spin chuck;
• a second temperature controller configured to control a temperature of the central region of the spin chuck;
• a thickness sensor configured to measure a thickness of the photoresist on the upper surface of the substrate;
• and
• a main controller configured to control operations of the first temperature controller and the second temperature controller in accordance with the thickness of the photoresist measured by the thickness sensor,
• wherein the first temperature controller includes
• four first non-contact type power supply devices spaced apart from each other by a same gap with respect to a center of the spin chuck,
• four first thermoelectric elements in the spin chuck, the four first thermoelectric elements configured to receive a first power from the four first non-contact type power supply devices, respectively, and configured to generate a first hot air or cold air, and
• four first transfer members extending from the center of the spin chuck and connected between the four first thermoelectric elements and the edge region of the spin chuck, the four first transfer members configured to transfer the first hot air or cold air to the edge region of the spin chuck, and
• wherein the second temperature controller includes
• four second non-contact type power supply devices spaced apart from each other by a same gap amount with respect to the center of the spin chuck,
• four second thermoelectric elements in the spin chuck, the four second thermoelectric elements configured to receive a second power from the four second non-contact type power supply devices, respectively, and configured to generate a second hot air or cold air, and
• four second transfer members extending from the center of the spin chuck between the four first transfer members, respectively, and connected between the four second thermoelectric elements and the central region of the spin chuck, the four second transfer members configured to transfer the second hot air or cold air to the central region of the spin chuck,
• wherein each of the four first non-contact type power supply devices comprises
• a first power transmitter positioned by the spin chuck, and
• a first power receiver in the spin chuck, the first power receiver electrically connected with a corresponding first thermoelectric element among of the four first thermoelectric elements and configured to receive the first power from the first power transmitter, and
• wherein each of the four second non-contact type power supply devices comprises:
• a second power transmitter by the spin chuck, and
• a second power receiver in the spin chuck, the second power receiver electrically connected with the a corresponding second thermoelectric element among the four second thermoelectric elements and configured to receive the second power from the second power transmitter,
• wherein each of the four first transfer members comprises
• a first main transfer member extending from the center of the spin chuck into the edge region of the spin chuck along a radial direction of the spin chuck,
• a plurality of first sub-transfer members extending from the first main transfer member into the edge region of the spin chuck, and
• a plurality of first connection members connected between ends of the plurality of first sub-transfer members, and
• wherein each of the four second transfer members comprises
• a second main transfer member extending from the center of the spin chuck into the central region of the spin chuck along the radial direction of the spin chuck,
• a plurality of second sub-transfer members extending from the second main transfer member into the central region of the spin chuck, and
• a plurality of second connection members connected between ends of the plurality of second sub-transfer members.