Integrated spot and flood illumination projector

A method for illumination, comprising:

• providing first and second arrays of emitters formed on an emitter die and configured to emit respective first and second beams of optical radiation;
• overlaying a substrate on the emitter die with a first surface of the substrate in contact with the emitter die so that the emitters emit the first and second beams of optical radiation through the first surface of the substrate;
• forming an optical metasurface on a second surface of the substrate, opposite the first surface, so as to collimate and diffuse the first beams without diffusing the second beams;
• and
• positioning an optical projection element to intercept both the first and the second beams that have passed through the optical metasurface and to direct both the first and the second beams toward a target while focusing the second beams to form a pattern of spots on the target.