Optical device and spectroscopic device
AssigneeSeiko Epson Corporation
InventorsKohei Yamada, Shoichi Takasuna
Life of this patent
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AssigneeSeiko Epson Corporation
InventorsKohei Yamada, Shoichi Takasuna
Estimating the term…
An optical device includes: an incident optical system; an analysis optical system; and a length measurement optical system. The incident optical system includes a laser light source, and an incident light dividing element that divides the laser light. The analysis optical system includes a first light dividing element that divides the first divided light and then mixes the light, a first mirror that adds a first modulation signal to the one first divided light by movement and reflection, a second mirror, and a first light receiving element that receives the first divided light including a sample-derived signal and the first modulation signal. The length measurement optical system includes a second light dividing element that divides the second divided light and then mixes the light, an optical feedback unit that feeds back the one second divided light to the second light dividing element, and a second light receiving element that receives the second divided light including a displacement signal generated by the first mirror.
An optical device comprising:
Dependencies are inferred from the claim text.