Systems and methods for annealing samples
AssigneeThe Research Foundation for The State University of New York
InventorsFatemeh Shahedipour-Sandvik, Vincent Meyers
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Abstract
A system and method for annealing samples. The system includes a thermal shielding enclosure including a cavity, with a first surface, a second surface, a microwave emitter, a sensor and a control system. Additionally, the control system can adjust operational characteristics of the microwave emitter in response to determining whether the measured temperature of the sample is equal to or greater than a first predetermined temperature of the sample or is equal to or less than a second predetermined temperature of the sample.
Claims20
A multi-pulse-rapid thermal annealing system, the system comprising:
- a thermal shielding enclosure including a cavity, the cavity receiving a sample having a first surface and a second surface opposite the first surface, the sample comprised of a material;
- a microwave emitter positioned within the cavity of the thermal shielding enclosure;
- a sensor positioned within the cavity of the thermal shielding enclosure;
- and
- a control system electrically coupled to the microwave emitter and the sensor, the control system configured to adjust at least one operational characteristic of the microwave emitter by performing processes including:
- measuring a temperature of the sample using the sensor;
- determining a conductivity of the material of the sample based upon the temperature;
- and based upon the determined conductivity, at least one of:
- adjusting the at least one operational characteristic of the microwave emitter in response to the measured temperature of the sample being equal to or greater than a first predetermined temperature of the sample, or
- adjusting the at least one operational characteristic of the microwave emitter in response to the measured temperature of the sample being equal to or less than a second predetermined temperature of the sample.
A method for annealing a material included within a sample, the method comprising:
- applying a microwave energy to the sample using a microwave emitter, the sample having a first surface and a second surface opposite the first surface, the sample comprised of a material;
- measuring a temperature of the sample receiving the microwave energy, the temperature indicating a conductivity of the material of the sample;
- determining a conductivity of the material of the sample based upon the temperature;
- and
- based upon the determined conductivity, at least one of:
- adjusting at least one operational characteristic of the microwave emitter in response to the measured temperature of the sample being equal to or greater than a first predetermined temperature of the sample, or
- adjusting at least one operational characteristic of the microwave emitter in response to the measured temperature of the sample being equal to or less than a second predetermined temperature of the sample.
A multi-pulse-rapid thermal annealing system, the system comprising:
- a shielding means for thermal shielding an enclosure including a cavity, the cavity receiving a sample having a first surface and a second surface opposite the first surface, the sample comprised of a material;
- a microwave emitting means for emitting microwaves positioned within the cavity of the shielding means;
- a sensing means for sensing, at least, temperature, the sensing means positioned within the cavity of the shielding means;
- and
- a control means electrically coupled to the microwave emitting means and the sensing means, the control means for adjusting at least one operational characteristic of the microwave emitting means by:
- measuring a temperature of the sample using the sensing means, the temperature indicating a conductivity of the material of the sample;
- determining a conductivity of the material of the sample based upon the temperature;
- and
- based upon the determined conductivity, at least one of:
- adjusting the at least one operational characteristic of the microwave emitting means in response to determining the measured temperature of the sample being equal to or greater than a first predetermined temperature of the sample, or
- adjusting the at least one operational characteristic of the microwave emitting means in response to determining the measured temperature of the sample being equal to or less than a second predetermined temperature of the sample.
Dependencies are inferred from the claim text.