Fluid measurement sensor and mass flow controller
AssigneeBeijing Aurasky Electronics Co., Ltd.
InventorsQianyi Su, Manli He, Zonglin Yang
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AssigneeBeijing Aurasky Electronics Co., Ltd.
InventorsQianyi Su, Manli He, Zonglin Yang
Estimating the term…
A fluid measurement sensor and a mass flow controller are provided. The fluid measurement sensor includes a sensor base, a cover plate, a housing, a sensing tube, and a thermal insulation layer; the housing is connected to the sensor base, the cover plate is connected to the housing from one side of the housing, an inner sidewall of the housing is provided with a first half groove, an inner sidewall of the cover plate is provided with a second half groove, and the first half groove and the second half groove form a mounting groove; and the sensing tube is provided with windings wound round the sensing tube, the sensing tube wrapped by the thermal insulation layer is disposed in the mounting groove, and two ends of the sensing tube penetrate through the sensor base.
A fluid measurement sensor, comprising a sensor base, a cover plate, a housing, a sensing tube, a thermal insulation layer, a pressing block, and a lead-out wire;
A mass flow controller, comprising a fluid measurement sensor, wherein the fluid measurement sensor comprises a sensor base, a cover plate, a housing, a sensing tube, a thermal insulation layer, a pressing block, and a lead-out wire;
Dependencies are inferred from the claim text.