Liquid delivery pump
AssigneeHitachi High-Tech Corporation
InventorsNobuhiro Tsukada, Daisuke Kanai, Sho Iwasa, Yushi Harada, Yusuke Yota
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AssigneeHitachi High-Tech Corporation
InventorsNobuhiro Tsukada, Daisuke Kanai, Sho Iwasa, Yushi Harada, Yusuke Yota
Estimating the term…
A liquid delivery pump delivers a liquid with high flow rate accuracy in consideration of solvent expansion, pressure dependent leakage of the solvent, and flow rate dependent leakage of the solvent. A liquid delivery pump includes first and second plunger pumps connected together, having respective first and second plungers. A pressure sensor measures a liquid delivery pressure (P2) from the second plunger pump, and a controller controls the driving of the first and second plungers. The controller obtains a moving speed (v1) of the first plunger and a moving speed (v2) of the second plunger using a parameter (C1, C0) depending on the liquid delivery pressures (P1, P2), the liquid delivery pressure, and a target flow rate of the liquid. The parameter (C1, C0) is a parameter of an expression representing a relationship between the liquid delivery pressure (P2) and a flow rate (Q0) of the liquid.
A liquid delivery pump that discharges a liquid, the liquid delivery pump comprising:
Dependencies are inferred from the claim text.