System and method for producing single crystal
AssigneeSumco Corporation
InventorsKenichi Nishioka, Keiichi Takanashi
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AssigneeSumco Corporation
InventorsKenichi Nishioka, Keiichi Takanashi
Estimating the term…
A system and method for producing a single crystal can prevent calculation and setting mistakes and provide an adequate correction amount in the next batch. A single crystal manufacturing system includes a pulling-up apparatus that calculates a diameter measurement value of a single crystal during a pulling-up process, calculates a first diameter of the single crystal by correcting the diameter measurement value using a diameter correction coefficient, and controls crystal pulling-up conditions based on the first diameter. A diameter measuring apparatus measures a diameter of the single crystal pulled up by the pulling-up apparatus to calculate a second diameter of the single crystal. A database server acquires the first diameter and the second diameter. The database server calculates a correction amount of the diameter correction coefficient from the first and second diameters obtained at diameter measurement positions which coincide with each other under room temperature.
A single crystal manufacturing system comprising:
A single crystal manufacturing method comprising:
Dependencies are inferred from the claim text.