Aluminum-scandium composite, aluminum-scandium composite sputtering target and methods of making
AssigneeMaterion Corporation
InventorsDavid Peter Van Heerden, Katharine S. Gardinier, Robert S. Bailey
Life of this patent
Estimating the term…
Abstract
An Al—Sc alloy sputtering target. The target comprising from 1.0 at % to 65 at % scandium and from 35 at % to 99 at % aluminum and having a microstructure including a first aluminum matrix phase and a second phase dispersed uniformly therethrough. The second phase comprises one or more compounds corresponding to the formula ScxAly, where x is from 1 to 2 and y is from 0 to 3.
Claims22
An Al—Sc composite comprising from 1.0 at % to 65 at % scandium (Sc) and from 35 at % to 99 at % aluminum (Al), having a microstructure including a first aluminum matrix phase and a second phase dispersed therethrough, the second phase comprising a compound corresponding to the formula AlxScy, where x is from 0 to 3 and y is from 1 to 2;
- wherein the concentration of scandium in the second phase is at least 1% greater than the concentration predicted by the equilibrium phase diagram for aluminum-scandium.
An Al—Sc composite sputtering target comprising from 1.0 at % to 65 at % scandium (Sc) and from 35 at % to 99 at % aluminum (Al), having a microstructure including a first aluminum matrix phase and a second phase dispersed therethrough, the second phase comprising a compound corresponding to the formula AlxScy, where x is from 0 to 3 and y is from 1 to 2;
- wherein the concentration of scandium in the second phase is at least 1% greater than the concentration predicted by the equilibrium phase diagram for aluminum-scandium.
An Al—Sc composite comprising from 1.0 at % to 65 at % scandium (Sc) and from 35 at % to 99 at % aluminum (Al), having a microstructure including a first aluminum matrix phase and a second phase dispersed therethrough, the second phase comprising a compound corresponding to the formula AlxSCy, where x is from 0 to 3 and y is from 1 to 2, wherein the second phase further comprises from 1.0 mol % to 70 mol % scandium nitride (ScN).
An Al—Sc composite sputtering target comprising from 1.0 at % to 65 at % scandium (Sc) and from 35 at % to 99 at % aluminum (Al), having a microstructure including a first aluminum matrix phase and a second phase dispersed therethrough, the second phase comprising a compound corresponding to the formula AlxScy, where x is from 0 to 3 and y is from 1 to 2;
- wherein the second phase further comprises from 1.0 mol % to 70 mol % scandium nitride (ScN).
Dependencies are inferred from the claim text.