Actuator, liquid discharge head, liquid discharge apparatus, and method of manufacturing actuator
AssigneeRicoh Company, Ltd.
InventorTsutoh Aoyama
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AssigneeRicoh Company, Ltd.
InventorTsutoh Aoyama
Estimating the term…
An actuator includes a substrate, a vibration film, and a piezoelectric element. The substrate has a void space having a first width, defined by opposed inner walls, in a width direction. The vibration film is disposed over the substrate in a lamination direction perpendicular to the width direction. The vibration film serves as a part of a wall of the void space. The piezoelectric element is disposed over the vibration film in the lamination direction. The piezoelectric element is opposed to the void space of the substrate via the vibration film. The piezoelectric element has a second width smaller than the first width in the width direction. The piezoelectric element has outer ends, defining the second width, within the opposed inner walls of the void space in the width direction.
An actuator comprising:
A method of manufacturing an actuator, the method comprising:
Dependencies are inferred from the claim text.