Directly bonded metal structures having oxide layers therein

A bonded structure comprising:

• a first element having a first nonconductive field region and a first conductive feature extending vertically through the first nonconductive field region;
• and
• a second element having a second nonconductive field region and a second conductive feature extending vertically through the second nonconductive field region, the second element directly hybrid bonded to the first element such that the first and second nonconductive field regions are directly bonded to one another along a horizontal bond interface and the first and second conductive features are directly bonded to one another,
• wherein the first conductive feature comprises an oxide layer and conductive material vertically adjacent above and below the oxide layer, including between the oxide layer and the second conductive feature.