Apparatus for film removal

A method of separating a first liner from a lens wafer, comprising:

• ejecting a fluid via at least one nozzle including a first open end facing an edge of the lens wafer, the at least one nozzle disposed proximal to a first lens wafer holder configured to hold the lens wafer having the first liner attached to a first surface of the lens wafer;
• and
• peeling the first liner from the surface of the lens wafer via a first peeling device including a second lens wafer holder configured to hold the lens wafer, a first auxiliary nozzle facing the lens wafer and including a first opening configured to eject a fluid, and a first at least one suction cup configured to contact the first liner on the first surface of the lens wafer,
• wherein:
• said at least one nozzle is an air nozzle;
• said first auxiliary nozzle is a first auxiliary air nozzle;
• said fluid is a gas;
• and
• said first at least one suction cup is configured to form a vacuum seal with the first liner, each suction cup of the first at least one suction cup being retractable in a direction away from the lens wafer.