Traversing robot with multiple end effectors

A method, comprising,

• providing a platform configured to traverse a stationary base along a motion path;
• providing a drive coupled to the platform;
• and
• connecting a pivoting base of a movable arm assembly to the drive,
• wherein a first linkage of the mobile arm assembly is connected to the pivoting base, the first linkage comprising a first link coupled to the pivoting base through a first rotary joint, the first link comprising a first end-effector having at least a first substrate holding area,
• wherein a second linkage of the mobile arm assembly is connected to the pivoting base, the second linkage comprising a second link coupled to the pivoting base through a second rotary joint, the second link comprising a second end-effector having at least a second substrate holding area, and
• wherein a third linkage of the mobile arm assembly is connected to the pivoting base, the third linkage comprising a third link coupled to the pivoting base through a through a third rotary joint, the third link comprising a third end-effector having at least a third substrate holding area,
• wherein the first rotary joint, the second rotary joint, and the third rotary joint are substantially coaxial and offset from an axis at which the pivoting base is connected to the drive;
• wherein the platform is configured to traverse the stationary base along a motion path in two opposing directions and wherein the drive and the movable arm assembly are configured to cause independent and simultaneous movement and transfer of substrates from at least one of the first substrate holding area, the second substrate holding area, or the third substrate holding area into a respective substrate workstation;
• and
• wherein at least one motor for moving at least one of the first linkage, the second linkage, or the third linkage is located in the pivoting base.

A method, comprising:

• placing a first substrate on a first substrate holding area of a first end-effector, placing a second substrate on a second substrate holding area of a second end-effector, and placing a third substrate on a third substrate holding area of a third end-effector, wherein the first end-effector, the second end-effector, and the third end-effector form a portion of a movable arm assembly comprising a pivoting base connected to a drive, wherein the movable arm assembly further comprises,
• a pivoting base connected to the drive,
• a first linkage connected to the pivoting base, the first linkage comprising a first link coupled to the pivoting base through a first rotary joint, the first link comprising the first end-effector having at least the first substrate holding area,
• a second linkage connected to the pivoting base, the second linkage comprising a second link coupled to the pivoting base through a second rotary joint, the second link comprising the second end-effector having at least the second substrate holding area, and
• a third linkage connected to the pivoting base, the third linkage comprising a third link coupled to the pivoting base through a third rotary joint, the third link comprising the third end-effector having at least the third substrate holding area,
• wherein the first rotary joint, the second rotary joint, and the third rotary joint are substantially coaxial and offset from an axis at which the pivoting base is connected to the drive;
• and
• moving the platform on the stationary base along a motion path in two opposing directions and moving the drive and the movable arm assembly to cause independent and simultaneous movement and transfer of substrates from at least one of the first substrate holding area, the second substrate holding area, or the third substrate holding area into or from a respective substrate workstation;
• and
• moving the movable arm assembly using at least one motor located in the pivoting base.