X-Y stage yaw correction method and X-Y stage
AssigneeKorea Institute of Machinery & Materials
InventorsDong Woo Kang, Hyun Chang Kim, Jaeyoung Kim, Kyung Rok Kim
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Abstract
The technology disclosed in the present disclosure is a method for correcting a yaw of an X-Y stage, including: moving an XY moving body in an X-axis or Y-axis direction using an actuator; measuring a yaw, which is a rotational displacement of the moved XY moving body, using a sensor; calculating, by a controller, a rotational stiffness value to be corrected, using the measured yaw data; and adding yaw correction flexures having a stiffness corresponding to the rotational stiffness value to be corrected to the X-Y stage.
Claims6
A method for correcting a yaw of an X-Y stage, comprising:
- moving an XY moving body in an X-axis or Y-axis direction using an actuator;
- measuring a yaw data, which is a rotational displacement of the moved XY moving body, using a sensor;
- calculating, by a controller, a rotational stiffness value to be corrected, using the measured yaw data;
- and
- adding yaw correction flexures having a stiffness corresponding to the rotational stiffness value to be corrected to the XY moving body stage.
Dependencies are inferred from the claim text.