Laser processing device, laser processing system, and laser processing method
AssigneeKabushiki Kaisha Yaskawa Denki
InventorsKatsuya Kazama, Jun Yagawa, Yoshihiro Yoshida, Takuji Ishige
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Abstract
A laser processing system includes an irradiation device that irradiates a laser beam to a workpiece and includes a housing, a box positioned inside the housing and housing at least a part of a path of the laser beam, and at least one infrared sensor positioned inside the housing and around the box.
Claims20
A laser processing system, comprising:
- an irradiation device configured to irradiate a laser beam to a workpiece, the irradiation device including:
- a housing,
- a box positioned inside the housing and housing at least a part of a path of the laser beam, and
- at least one infrared sensor positioned inside the housing and around the box, the at least one infrared sensor being positioned to directly detect first infrared light from a mirror reflecting the laser beam without an element therebetween;
- and
- first control circuitry configured to
- determine whether or not the at least one infrared sensor of the irradiation device has detected the first infrared light of a specific wavelength, and
- stop irradiation of the laser beam by the irradiation device when the first infrared light is detected.
A laser processing method for processing a workpiece, comprising:
- irradiating a laser beam to workpiece by an irradiation device including a housing, a box positioned inside the housing and housing at least a part of a path of the laser beam, at least one infrared sensor positioned inside the housing and around the box, the at least one infrared sensor being positioned to directly detect first infrared light from a mirror reflecting the laser beam without an element therebetween;
- determining whether or not the at least one infrared sensor of the irradiation device has detected the first infrared light of a specific wavelength;
- and
- stopping the irradiation of the laser beam by the irradiation device when it is determined that the first infrared light has been detected.
A non-transitory computer readable medium having stored thereon a program that when executed by a computer causes the computer to implement a laser processing method for processing a workpiece, the laser processing method comprising:
- irradiating a laser beam to workpiece by an irradiation device including a housing, a box positioned inside the housing and housing at least a part of a path of the laser beam, and at least one infrared sensor positioned inside the housing and around the box, the at least one infrared sensor being positioned to directly detect first infrared light from a mirror reflecting the laser beam without an element therebetween;
- determining whether or not the at least one infrared sensor has detected the first infrared light of a specific wavelength;
- and
- stopping the irradiation of the laser beam when it is determined that the first infrared light has been detected.
Dependencies are inferred from the claim text.