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US 12,544,854 B2Granted
Processing apparatus, processing system, and manufacturing method of movable body
AssigneeNikon Corporation
InventorsMasayuki Shiraishi, Shigeki Egami, Yoshio Kawabe, Yosuke Tatsuzaki, Baku Ogasawara
Life of this patent
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Abstract
A processing apparatus has: a light irradiation apparatus that irradiates a surface of an object with a processing light; and a measurement apparatus that measures a position of an irradiation area, which is formed on the surface of the object by the light irradiation apparatus, relative to the object.
Claims13
A processing method comprising:
- irradiating, with a light irradiation apparatus, a surface of an object with a processing light so as to form a structure on the surface of the object;
- measuring, from a position that is away from the light irradiation apparatus and based on light emitted in a first direction intersecting a normal of the surface of the object, a position of the light irradiation apparatus in at least a second direction also intersecting the normal of the surface of the object, the measuring including measuring, with a measurement apparatus comprising a camera, at least a part of the light irradiation apparatus and at least a part of the object, at least a part of the light irradiation apparatus and at least a part of the object being included in a measurement range of the measurement apparatus;
- moving the light irradiation apparatus along at least the second direction;
- and
- controlling, based on a measured result about the position of the light irradiation apparatus in the second direction, a positional relationship between the object and an irradiation area, which is formed on the surface of the object by the light irradiation apparatus, in the second direction along the surface of the object.
2 more elements
Dependencies are inferred from the claim text.