Reduction treatment method
AssigneeUshio Denki Kabushiki Kaisha
InventorAkihiro Shimamoto
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Abstract
Provided is a reduction treatment method in which hydrogen radicals are efficiently generated in an amount required for reduction treatment and the surface of an object to be treated is reduced by a relatively simple treatment process. A reduction treatment method including: irradiating a hydrogen radical source-containing material with ultraviolet light having a wavelength of 255 nm or less to generate hydrogen radicals; and bringing the generated hydrogen radicals into contact with a surface of an object to be treated to reduce the surface.
Claims8
A reduction treatment method comprising:
- using a reduction treatment apparatus to
- irradiate a hydrogen radical source-containing material with ultraviolet light having a wavelength of 205 nm or less to generate hydrogen radicals, the wavelength of 205 nm or less is set so that the photon absorption cross section per molecule is generally about 1×10−20 (cm2·molecule−1) or more in the absorption spectrums of the hydrogen radical source-containing material;
- and
- bring the generated hydrogen radicals into contact with a surface of an object to be treated in an atmospheric pressure environment, the hydrogen radicals reduce the surface by at least one of removing oxygen from the object to be treated, adding hydrogen to the object to be treated, and adding electrons to the object to be treated, the object to be treated is a metal or a semiconductor having an oxide film on the surface thereof, or is a resin having a hydrophilic group on the surface thereof,
- wherein the hydrogen radical source-containing material is a gas which contains an alcohol,
- the reduction treatment apparatus has a light source emitting the ultraviolet light with the wavelength of 205 nm or less and a stage for placing the object to be treated, and
- the reduction treatment apparatus does not have a configuration for generating plasma using high-frequency power.
A reduction treatment method comprising:
- using a reduction treatment apparatus to
- bring a gas containing an alcohol as a hydrogen radical source-containing material into contact with a surface of an object to be treated, wherein the object to be treated is a metal or a semiconductor having an oxide film on the surface thereof, or is a resin having a hydrophilic group on the surface thereof;
- and
- irradiate the gas in contact with the surface of the object to be treated with ultraviolet light having a wavelength of 205 nm or less to generate hydrogen radicals and to contact the hydrogen radicals to the surface of the object to be treated in an atmospheric pressure environment, the hydrogen radicals reduce the surface by at least one of removing oxygen from the object to be treated, adding hydrogen to the object to be treated, and adding electrons to the object to be treated, the wavelength of 205 nm or less is set so that the photon absorption cross section per molecule is generally about 1×10−20 (cm2·molecule−1) or more in the absorption spectrums of the hydrogen radical source-containing material,
- wherein the reduction treatment apparatus has a light source emitting the ultraviolet light with the wavelength of 205 nm or less and a stage for placing the object to be treated, and
- the reduction treatment apparatus does not have a configuration for generating plasma using high-frequency power.
Dependencies are inferred from the claim text.