Bowl for processing a substrate and processing substrate device including the same

A substrate processing device, comprising:

• a container having a processing space therein;
• a substrate support unit located inside the container and supporting a substrate;
• and
• a nozzle unit spraying a processing liquid onto the substrate disposed on the substrate support unit,
• wherein the container includes a bowl provided with an entrance open in a vertical direction,
• wherein the bowl includes a main body surrounding the substrate support unit and a groove formed in a spiral shape in at least a portion of an inner surface of the main body, and the groove includes an upper groove wall having a first curved surface on an upper side and a lower groove wall having a second curved surface on a lower side, wherein a radius of curvature of the first curved surface is greater than a radius of curvature of the second curved surface.

A substrate processing device, comprising:

• a container having a processing space therein;
• a substrate support unit located inside the container and supporting a substrate;
• and
• a nozzle unit spraying a processing liquid onto the substrate disposed on the substrate support unit,
• wherein the container includes a bowl provided with an entrance open in a vertical direction,
• wherein the bowl includes a main body surrounding the substrate support unit;
• a groove formed in a spiral shape on an inner surface of the main body;
• and
• a separation wall disposed between adjacent grooves in a vertical direction on the inner surface of the main body,
• wherein the main body includes a flat portion whose outer surface extends in the vertical direction and an inclined portion whose outer surface is formed as an inclined surface with respect to the vertical direction,
• wherein the groove is formed at least in an inner surface corresponding to the flat portion,
• wherein when viewed in a cross-section perpendicular to a circumferential direction of the main body, the groove includes a first groove, a second groove, adjacent to the first groove and located below the first groove, and a third groove, adjacent to the second groove and located below the second groove, and the separation wall includes a first separation wall disposed between the first groove and the second groove, and a second separation wall disposed between the second groove and the third groove,
• wherein a first virtual line connecting innermost points of the first separation wall and the second separation wall is inclined at a first angle in the vertical direction so that a distance from a central line of the bowl increases downwardly,
• wherein the first virtual line and a second virtual line connecting outermost points of the first and second grooves are parallel,
• wherein the first separation wall includes a first inner surface parallel to the first virtual line and a second inner surface extending from the first groove and inclined with respect to the first virtual line,
• wherein a second angle formed by the second inner surface and the first inner surface is greater than a third angle formed by an upper groove wall in which the first inner surface extends to a groove below the separation wall and the first inner surface,
• wherein the groove includes the upper groove wall having a first curved surface connected to an upper separation wall and a lower groove wall having a second curved surface connected to a lower separation wall, wherein a radius of curvature of the first curved surface is greater than a radius of curvature of the second curved surface, and
• the first angle is between 1 and 3°.