Method for preparing single-atom, atomic cluster or single-molecular catalyst for oxidative coupling of methane using chemical vapor deposition

A method for preparing a M-M′ catalyst for oxidative coupling of methane, comprising:

• (a1) a step of depositing a solution of a precursor of a M′ catalyst on a support and then drying the same to obtain a dried catalyst, (a2) a step of obtaining a M′ catalyst deposited on the support by removing the functional groups of the precursor of a M′ catalyst through heat treatment of the dried catalyst, (b) a step of locating the M′ catalyst deposited on the support in a reactor, (c) a step of locating the precursor of a M metal in an evaporator, (c′) a step of supplying a gas for creating a gas atmosphere in the reactor into the reactor, (c″) a step of supplying a gas for creating a gas atmosphere in the evaporator into the evaporator, (d) a step of heating the reactor to a reaction temperature, (e) a step of heating the evaporator to an evaporation temperature, (f) a step of supplying a carrier gas to the evaporator and depositing a single M metal atom on the M′ catalyst deposited on the support by transporting the carrier gas to the reactor via a gas tube connected to the evaporator, (f′) a step of interrupting the flow of the carrier gas transported to the reactor and supplying an inert carrier gas selected from nitrogen, argon, helium and mixtures thereof into the reactor, and (g) a step of preparing a M-M′ catalyst by alloying the support with the single M metal atom deposited and the deposited M′ catalyst through alloying heat treatment;
• and wherein the M′ catalyst is a manganese (Mn) catalyst, a cerium (Ce) catalyst, or a mixture thereof;
• wherein the M is tungsten (W);
• and wherein in step (d), the reactor is heated to a reaction temperature selected within a range of 180-200° C. at a rate of 1-9° C./min, and, in step (e), the evaporator is heated to an evaporation temperature selected within a range of 90-100° C. at a rate of 1-9° C./min.