Substrate handling device with adjustable joints
AssigneeASM IP Holding B.V.
InventorsKiHyun Kim, Sam Kim, Rutvij Naik
Life of this patent
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Abstract
An adjustable joint for insertion into a linkage of a substrate handler utilized for substrate processing. The adjustable joint allows for adjusting the pitch and roll of an attached link. Such adjustment may permit aligning a pickup surface of an end effector to a desired plane. Once adjusted, the joint may be fixed to maintain the desired orientation of the attached link. The adjustable joint allows for correcting deflection of a pickup surface of an end effector relative to a desired pickup plane due to, for example, drooping caused by high temperature usage, mechanical tolerances and/or installation errors.
Claims11
A substrate handling device, comprising:
- a first link comprising and extending between a proximal end and a distal end;
- a second link comprising and extending between a proximal end and a distal end;
- a rotary coupling coupled between the distal end of the first link and to the proximal end of the second link;
- and
- an adjustable joint disposed between the rotary coupling and the proximal end of the second link, the adjustable joint configured to adjust a pitch or roll of at least a portion of the second link, wherein the adjustable joint comprises:
- a first body connected to the rotary joint;
- and
- a second body connected to the proximal end of the second link, wherein the first body and the second body are rigidly connectable at a selected contact angle to adjust the pitch or roll of at least the portion of the second link,
- wherein the first body comprises an adjustment surface and the second body comprises a contact surface, wherein the adjustment surface is disposed against the contact surface when the first body and the second body are rigidly connected, and wherein the adjustment surface comprises first and second surfaces that are abutting, with the first surface being angled away from the second surface.
Dependencies are inferred from the claim text.