US 12,543,533 B2 · Arrangement jig for a side track buffer, side track buffer system having an arrangement jig and method of arranging a side track buffer using an arrangement jig

Abstract

Provided are an alignment jig, a side track buffer system including the same, and an alignment method using the same. The alignment jig includes a horizontal jig fixed to a bottom plate of a side track buffer to extend in a horizontal direction to a lower portion of the transfer rail, and a vertical jig fixed to the transfer rail to extend downward in a vertical direction so as to be adjacent to a top surface in the horizontal direction. A separation distance between an intersection point of the vertical jig and the horizontal jig and a central portion of the bottom plate is detected as a buffer separation distance, and a buffer frame is horizontally moved automatically or manually to allow the buffer separation distance to match a reference separation distance, so that the side track buffer is installed in an accurate position.

Claims20

Dependent claims

An alignment jig for arranging a side track buffer, the alignment jig comprising:

a horizontal jig fastened to a bottom plate of the side track buffer to extend perpendicularly to a boundary line of the bottom plate, and formed at a top surface thereof with a distance measurement scale;
a vertical jig fastened to a transfer rail of a ceiling conveyance device to extend downward so as to intersect the horizontal jig;
and
a detection needle fixed to an end of the vertical jig to detect the scale corresponding to an intersection point of the horizontal jig and the vertical jig so as to provide a buffer separation distance, which is a horizontal distance between the side track buffer and the transfer rail.

1 more element

A side track buffer system comprising:

a side track buffer including a buffer frame fixed to a ceiling so as be suspended from the ceiling, a bottom plate constituting a bottom of the buffer frame and disposed under a side portion of a transfer rail for a ceiling conveyance device, and at least one buffer port arranged on the bottom plate to accommodate a conveyance vehicle in which a semiconductor substrate is stored;
and
an alignment jig including a horizontal jig fastened to the bottom plate to extend to a lower portion of the transfer rail so as to be perpendicular to a boundary line of the bottom plate in a horizontal direction that is parallel to the bottom plate, and a vertical jig fastened to the transfer rail in a buffer region of the transfer rail to extend in a vertical direction that is perpendicular to the horizontal direction, and configured to detect a distance between an intersection point of the horizontal jig and the vertical jig and the buffer frame as a buffer separation distance.

A method of arranging a side track buffer, the method comprising:

temporarily installing a side track buffer including a buffer frame fixed a ceiling so as to be suspended from the ceiling, a bottom plate constituting a bottom of the buffer frame and disposed under a side portion of a transfer rail for a ceiling conveyance device, and at least one buffer port arranged on the bottom plate to accommodate a front opening unified pod (FOUP);
fixing a horizontal jig to a central portion of the bottom plate so that the horizontal jig extends to a lower portion of the transfer rail so as to be perpendicular to a boundary line of the bottom plate in a horizontal direction that is parallel to the bottom plate;
fixing a vertical jig to the transfer rail so that the vertical jig extends in a vertical direction that is perpendicular to the horizontal direction to intersect the horizontal jig so as to detect an intersection point;
and
arranging a position of the central portion of the bottom plate by comparing a buffer separation distance, which is a separation distance between the intersection point and the central portion of the bottom plate, with a reference separation distance.

2 more elements

Dependencies are inferred from the claim text.

Arrangement jig for a side track buffer, side track buffer system having an arrangement jig and method of arranging a side track buffer using an arrangement jig

Life of this patent

Arrangement jig for a side track buffer, side track buffer system having an arrangement jig and method of arranging a side track buffer using an arrangement jig

Life of this patent

Abstract

Claims20