Semiconductor device and method for fabricating the same
AssigneeSK hynix Inc.
InventorJong Min Yun
Life of this patent
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Abstract
An semiconductor device may include a first conductive line; a second conductive line disposed to be spaced apart from the first conductive line; a variable resistance layer disposed between the first conductive line and the second conductive line; and an electrode layer which is disposed at least one of a first location between the first conductive lines and the variable resistance layer, or a second location between the variable resistance layer and the second conductive lines and includes a thickness dependent metal-insulator transition (TDMIT) material that exhibits an electrical resistance depending on a thickness of the TDMIT material.
Claims10
A method for fabricating a semiconductor device comprising:
- forming a thickness dependent metal-insulator transition (TDMIT) material layer, the TDMIT material layer having an electrical resistance depending on a thickness of the TDMIT material;
- forming a variable resistance layer under or above the TDMIT material layer;
- and
- performing a patterning process on the TDMIT material layer and the variable resistance layer to form an electrode layer and a variable resistance layer pattern.
Dependencies are inferred from the claim text.