Member for semiconductor manufacturing apparatus
AssigneeNGK Insulators, Ltd.
InventorsSeiya Inoue, Tatsuya Kuno
Life of this patent
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Abstract
A member for a semiconductor manufacturing apparatus includes a disk-shaped or annular ceramic heater, a metal base, an adhesive element bonding the metal base and the ceramic heater, an adhesive protective element disposed between the ceramic heater and the metal base to extend along a periphery of the adhesive element, and an anti-adhesion layer disposed between the adhesive element and the protective element, the anti-adhesion layer preventing adhesion between the adhesive element and the protective element.
Claims13
A member for a semiconductor manufacturing apparatus, the member comprising:
- a disk-shaped or annular ceramic heater including a top surface and a bottom surface;
- a metal base including a top surface and a bottom surface;
- an adhesive element bonding the top surface of the metal base and the bottom surface of the disk-shaped or annular ceramic heater;
- an adhesive protective element disposed between and in direct contact with the bottom surface of the disk-shaped or annular ceramic heater and the top surface of the metal base to extend along a periphery of the adhesive element;
- and
- an anti-adhesion layer disposed between the adhesive element and the protective element, the anti-adhesion layer preventing adhesion between the adhesive element and the protective element;
- and
- wherein the anti-adhesion layer is disposed between the bottom surface of the disk-shaped or annular ceramic heater and the top surface of the metal base.
A member for the semiconductor manufacturing apparatus, the member comprising:
- a disk-shaped or annular ceramic heater including a top surface and a bottom surface;
- a metal base including a top surface and a bottom surface;
- an adhesive element bonding the top surface of the metal base and the bottom surface of the disk-shaped or annular ceramic heater;
- and
- an adhesive protective element disposed between the disk-shaped or annular ceramic heater and the metal base to extend along a periphery of the adhesive element,
- wherein the adhesive element includes a main portion, an auxiliary portion that is narrower than the main portion, wherein the auxiliary portion is disposed along a periphery of the main portion and bonded to the protective element,
- and an anti-adhesion portion disposed between the main portion and the auxiliary portion;
- and
- wherein the anti-adhesion portion is disposed between the bottom surface of the disk-shaped or annular ceramic heater and the top surface of the metal base.
Dependencies are inferred from the claim text.