Acoustic wave device with trench portions and narrow interdigital transducer tip portions for transverse mode suppression

A radio frequency filter comprising at least one acoustic wave device, the acoustic wave device including:

• a layer of piezoelectric material;
• a pair of interdigital transducer electrodes disposed on an upper surface of the layer of piezoelectric material, each of the pair of interdigital transducer electrodes including a bus bar and a plurality of electrode fingers extending from the bus bar through a central region of the pair of interdigital transducer electrodes towards an edge region of a respective interdigital transducer electrode of the pair of interdigital transducer electrodes, each of the plurality of electrode fingers having a width in a direction perpendicular to an extension direction of the plurality of electrode fingers that is smaller in the edge regions than in the central region;
• and
• trench portions located in the upper surface of the layer of piezoelectric material, the trench portions overlapping with the edge regions of the pair of interdigital transducer electrodes, none of the trench portions being covered by portions of any portions of the pair of interdigital transducer electrodes.

An electronics module comprising at least one radio frequency filter that includes at least one acoustic wave device, the at least one acoustic wave device including:

• a layer of piezoelectric material;
• a pair of interdigital transducer electrodes disposed on an upper surface of the layer of piezoelectric material, each of the pair of interdigital transducer electrodes including a bus bar and a plurality of electrode fingers extending from the bus bar through a central region of the pair of interdigital transducer electrodes towards an edge region of a respective interdigital transducer electrode of the pair of interdigital transducer electrodes, each of the plurality of electrode fingers having a width in a direction perpendicular to an extension direction of the plurality of electrode fingers that is smaller in the edge regions than in the central region;
• and
• trench portions located in the upper surface of the layer of piezoelectric material, the trench portions overlapping with the edge regions of the pair of interdigital transducer electrodes, none of the trench portions being covered by any portions of the pair of interdigital transducer electrodes.