Cylindrical cathode and chamber using same for sputtering

A sputtering system comprising:

• a cylindrical target having sputtering material on exterior surface thereof;
• a first magnet arrangement provided inside the cylindrical target, the first magnet arrangement comprising:
• a first set comprising a plurality of magnets arranged on a single straight row, each magnet of the first set having a first pole facing interior wall of the cylindrical target and a second pole facing away from the interior wall,
• a second set comprising a plurality of magnets arranged in a obround shape around the first set, each magnet of the second set having the first pole facing away from the interior wall of the cylindrical target and the second pole facing the interior wall;
• a keeper plate positioned between the first set of magnets and the second set of magnets, such that magnetic field lines emanating from magnets of the first set must pass through the keeper plate in order to reach magnets of the second set;
• and
• a cover enclosing the second set of magnets between the cover and the keeper plate;
• wherein the keeper plate has a cross-section comprising a flat base, two parallel risers extending from opposing edges of the base, and two outwardly angled extensions extending in opposite direction from each other from the ends of the risers.

A sputtering system, comprising:

• a. a vacuum enclosure having a ceiling, sidewall and floor;
• b. transport tracks provided over the floor for transporting substrates in a transport direction on a first horizontal plane;
• c. a first cylindrical target positioned within the vacuum enclosure and having sputtering material on exterior surface thereof, the first cylindrical target rotating about its first rotational axis;
• d. a magnet arrangement provided inside the cylindrical target, the magnet arrangement comprising a first set of magnets arranged on a single straight row, each magnet of the first set having a first pole facing interior wall of the cylindrical target and a second pole facing away from the interior wall, a second set of magnets arranged in a race-track shape around the first set, each magnet of the second set having the first pole facing away from the interior wall of the cylindrical target and the second pole facing the interior wall;
• e. a keeper plate positioned between the first set of magnets and the second set of magnets, such that a straight line passing through an axis of a magnet from the second set intercepts the keeper plate prior to reaching the interior wall, while a straight line passing through an axis of a magnet from the first set reaches the interior wall without having to intercept the keeper plate;
• and
• f. a cover enclosing the second set of magnets between the cover and the keeper plate.