Member for plasma processing apparatus, method for manufacturing same, and plasma processing apparatus

A method for manufacturing a member for a plasma processing apparatus comprising:

• a preparation step of preparing a base material;
• a coating step of applying a coating composition containing a fluorine-based compound that produces a fluorine-based elastomer to one surface of the base material by heating or irradiation with ultraviolet rays to form a coating layer;
• and
• a heat transfer layer forming step of heating the coating layer or irradiating the coating layer with ultraviolet rays to produce a heat transfer layer containing the fluorine-based elastomer, wherein
• the fluorine-based elastomer is a fluorine-containing three-dimensional crosslinkable compound having a fluorine-containing group and a three-dimensional crosslinked structure,
• the fluorine-containing group is either one or both of a perfluoroalkylene group and a perfluoropolyether group, and
• the three-dimensional crosslinked structure is either one of an epoxy structure having an epoxy bond or a urethane structure having a urethane bond.

A plasma processing apparatus comprising:

• an electrode plate for a plasma processing apparatus having a vent hole through which a gas for plasma generation passes;
• and
• a focus ring, wherein
• the focus ring or each of both of the electrode plate for a plasma processing apparatus and the focus ring includes a heat transfer layer, and
• the heat transfer layer contains a fluorine-based elastomer,
• the fluorine-based elastomer is a fluorine-containing three-dimensional crosslinkable compound having a fluorine-containing group and a three-dimensional crosslinked structure,
• the fluorine-containing group is either one or both of a perfluoroalkylene group and a perfluoropolyether group, and
• the three-dimensional crosslinked structure is either one of an epoxy structure having an epoxy bond or a urethane structure having a urethane bond.