Imprinting apparatus
AssigneeKoninklijke Philips N.V.
InventorsDidier Mathijs Maria Justina Petit, Marcus Antonius Verschuuren, Jens Udo Barendt
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Abstract
An imprinting apparatus comprises a first carrier for carrying a flexible stamp having an imprinting pattern and a second carrier movable relative to the first carrier and configured to carry a substrate having a resist layer. The second carrier comprises a chuck and an interface plate over the chuck, wherein the interface plate comprises an array of openings for receiving already-imprinted areas of one side of a substrate while an opposite side of the substrate is to be imprinted. The chuck comprises a fluid passage arrangement for coupling to the openings of the array.
Claims19
An imprinting apparatus comprising:
- a first carrier for carrying a flexible stamp having an imprinting pattern;
- and
- a second carrier movable relative to the first carrier and configured to carry a substrate, the substrate having a resist layer,
- wherein the second carrier comprises:
- a chuck;
- and
- an interface plate over the chuck, wherein the interface plate comprises an array of openings for receiving already-imprinted areas of one side of a substrate while an opposite side of the substrate is to be imprinted, and wherein the chuck comprises a fluid passage arrangement for coupling to the openings of the array.
Dependencies are inferred from the claim text.