Spatial light modulators, methods of driving and manufacturing the same, and apparatuses including the spatial light modulators

Abstract

Provided are spatial light modulators, methods of driving and manufacturing the same, and apparatuses including the spatial light modulators. The spatial light modulator according to an example embodiment includes a substrate, a distributed Bragg reflector (DBR) layer stacked on one surface of the substrate, a cavity layer on the DBR layer, a pixel layer on the cavity layer and including a plurality of pixels, and a heat blocking member between the plurality of pixels to block heat transfer between the plurality of pixels, wherein a material layer having a lower thermal conductivity than the lowermost layer of the DBR layer is provided between the substrate and the DBR layer, and each of the plurality of pixels includes a plurality of active meta-patterns. In one example, the material layer, the DBR layer, and the cavity layer are each divided corresponding to the plurality of pixels, and the heat blocking member is provided between the divided material layers, between the divided DBR layers, and between the divided cavity layers.

Dependencies are inferred from the claim text.