Isolator and isolator manufacturing method

Abstract

An isolator includes a substrate having a substrate surface, a waveguide, a groove, a mask, and a non-reciprocal member. The waveguide is disposed above the substrate surface and has a first surface facing the substrate surface, a second surface opposite the first surface, and a side face connecting the first surface to the second surface. The groove includes a bottom portion and a side portion configured to expose at least part of the side face of the waveguide. The mask is disposed above and overlaps at least a region of the second surface of the waveguide, as viewed in a direction normal to the substrate surface. The region of the second surface of the waveguide is in contact with the groove. The non-reciprocal member is disposed in the groove and is in contact with the side face of the waveguide.

Dependencies are inferred from the claim text.