Magneto-optical sensor for monitoring of a semiconductor element in a semiconductor module
AssigneeSiemens Aktiengesellschaft
InventorsUlrich Wetzel, Jürgen Zettner
Life of this patent
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Abstract
A magneto-optical sensor monitors a semiconductor element in a semiconductor module. The magneto-optical sensor is arranged in a region of the semiconductor element or of at least one of the feed lines of the semiconductor module that make contact with the semiconductor element. A polarized light signal is reflected from the magneto-optical sensor or transmitted through the magneto-optical sensor. A current is determined from a polarization of the reflected or transmitted light signal.
Claims20
A method for monitoring a semiconductor element in a semiconductor module, wherein the semiconductor module comprises feed lines contacting the semiconductor element, the method comprising:
- arranging a magneto-optical sensor in a region of the semiconductor element or of at least one of the feed lines;
- reflecting a polarized light signal from the magneto-optical sensor or transmitting a polarized light signal through the magneto-optical sensor, and
- determining a current from a polarization of the reflected or transmitted light signal.
A semiconductor module, comprising:
- a semiconductor element and feed lines for contacting the semiconductor element;
- a light source designed to generate a polarized light signal;
- a magneto-optical sensor arranged in a region of the semiconductor element or of at least one feed line and designed to reflect or transmit the polarized light signal generated by the light source;
- a detection unit designed to convert the reflected or transmitted polarized light signal into an electrical signal;
- and
- an evaluation unit designed to determine a current from a polarization of the reflected or transmitted polarized light signal.
Dependencies are inferred from the claim text.