Method for measuring by thermography a heating surface, in particular an electric heating plate

A method for measuring by thermography a heating surface intended to warm up silicon wafers for checking of thermal homogeneity of said heating surface, said method

• comprising:
• a homogeneous layer with constant thickness of a coating material is deposited onto the heating surface to be measured to improve a detectable emissivity of the surface and to promote uniformity of the emissivity of the surface;
• the surface is heated to a determined temperature;
• a thermal image of said surface coated with said layer of coating material, heated, is captured by means of a thermal measurement apparatus;
• the coating material having the emissivity detectable at the determined temperature within the spectral range of the thermal measurement apparatus;
• and
• the coating material is removed from the heating surface after thermal measurement.