Abatement apparatus
AssigneeEdwards Limited
InventorAndrew James Seeley
Life of this patent
Estimating the term…
Abstract
A method of cooling an abatement apparatus for abatement of an effluent stream from a semiconductor processing tool includes: providing at least one modular cooling assembly having a cooling capacity; determining a cooling requirement of an abatement apparatus; and incorporating into the abatement apparatus a number of the modular cooling assemblies whose cumulative cooling capacity at least matches the cooling requirement of the abatement apparatus. In this way, multiple modular cooling assemblies may be incorporated into the abatement apparatus, each of which provides cooling capacity. The number of modular cooling assemblies can be selected to suit the cooling requirement of the abatement apparatus.
Claims24
A method of cooling an abatement apparatus for abatement of an effluent stream from a semiconductor processing tool, the method comprising:
- providing at least one modular cooling assembly having a cooling capacity;
- determining a cooling requirement of an abatement apparatus;
- and
- incorporating into said abatement apparatus a number of said modular cooling assemblies whose cumulative cooling capacity at least matches said cooling requirement of said abatement apparatus.
An abatement apparatus for abatement of an effluent stream from a semiconductor processing tool, the abatement apparatus having a cooling requirement and comprising:
- a number of modular cooling assemblies whose cumulative cooling capacity at least matches said cooling requirement of said abatement apparatus.
Dependencies are inferred from the claim text.