Method for producing short subcritical cracks in solid bodies

A method for producing modifications in an interior of a solid body, the method comprising:

• providing a laser;
• and
• introducing laser radiation from the laser into the interior of the solid body via a first surface of the solid body, the laser radiation producing modifications at predetermined locations on a production plane in the interior of the solid body,
• wherein the solid body forms a crystal structure,
• wherein the solid body has a second surface parallel to the first surface,
• wherein a plurality of linear shapes are produced by the modifications,
• wherein the solid body cracks subcritically in a region of each respective modification to form subcritical cracks,
• wherein the subcritical cracks have orthogonality to a direction of longitudinal extent of the respective linear shape and an average crack length of less than 150 μm,
• wherein the modifications that belong to the same linear shape and are successively produced are spaced at a distance from one another which is defined by:
• (d−x)/d<−0.31,
• wherein d is the diameter of a focal point of the laser radiation and x is the distance between adjacent focal points of the laser radiation,
• wherein x>d,
• wherein the distance between two directly adjacent linear shapes in each case is less than 50 μm.